▎ 摘　　要

NOVELTY - The method involves (S1) depositing an isolation layer on the surface of a CMOS integrated circuit, (S2) etching through holes in the isolation layer and filling metal, (S3) sputtering a metallic nickel layer on the surface of the isolation layer, (S4) plasma-enhancing chemical vapor deposition of graphene on the surface of the metallic nickel layer, (S5) performing corrosion to remove the metallic nickel layer, and (S6) preparing electrodes to obtain the graphene-CMOS monolithic integrated detector chip. USE - Preparation method of a graphene-complementary metal oxide semiconductor (CMOS) monolithic integrated detector chip for infrared imaging system (claimed) used in night vision technology such as night monitoring, night field detection and night navigation, used for military guidance in military affairs, and used in aviation, aerospace and medical imaging. ADVANTAGE - The method can realize multi-spectral infrared imaging by introducing graphene-CMOS monolithic integrated detector chip, which effectively solves the technical difficulty of low cost and multireflection infrared imaging in the existing infrared imaging field. The method is compatible with the current mature CMOS process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an infrared imaging system based on a graphene-CMOS monolithically integrated detector chip. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart illustrating a preparation method of a graphene-CMOS monolithic integrated detector chip. (Drawing includes non-English language text) Step for depositing an isolation layer on the surface of a CMOS integrated circuit (S1) Step for etching through holes in the isolation layer and filling metal (S2) Step for sputtering a metallic nickel layer on the surface of the isolation layer (S3) Step for plasma-enhancing chemical vapor deposition of graphene on the surface of the metallic nickel layer (S4) Step for performing corrosion to remove the metallic nickel layer (S5) Step for preparing electrodes to obtain the graphene-CMOS monolithic integrated detector chip (S6)