• 专利标题:   Graphene-based heterojunction field effect transistor for integrated circuit, comprises substrate, gate electrode, dielectric layer, graphene layer, electrodes, and oxide semiconductor layer provided between graphene layer and electrodes.
  • 专利号:   CN110534579-A
  • 发明人:   QIAN L, XING Z, ZHANG Y, LI X, ZHANG W
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H01L021/336, H01L029/786
  • 专利详细信息:   CN110534579-A 03 Dec 2019 H01L-029/786 201999 Pages: 11 Chinese
  • 申请详细信息:   CN110534579-A CN10838249 05 Sep 2019
  • 优先权号:   CN10838249

▎ 摘  要

NOVELTY - A graphene-based heterojunction field effect transistor comprises a substrate, gate electrode, dielectric layer, graphene layer, a source electrode, a drain electrode and an oxide semiconductor layer provided between the graphene layer and electrodes. USE - Graphene-based heterojunction field effect transistor for integrated circuit (claimed) used in logic and radio frequency applications. ADVANTAGE - The field effect transistor has high mobility, saturated output characteristics, and is manufactured by a simple process suitable for large-scale production. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for preparation of the graphene-based heterojunction field effect transistor.