▎ 摘　　要

NOVELTY - Manufacturing standard leak holes based on graphene membrane prepared by transfer-free technology, comprises using acetone, isopropyl alcohol and acetic acid to remove oxides and other contaminants on the surface of copper foil, and preparing graphene, adopting the oxidation plasma etching method to remove the graphene film on the copper foil that will be coated with the photoresist, and spin-coating a layer of polymethyl methacrylate (PMMA) on the side covered with graphene, spin-coating a layer of AZ MIR-701 photoresist on the side of the copper foil with the graphene removed, and after exposure and development, etching copper foil with ammonium persulfate solution, immersing the copper foil in the acetone solution to remove the residual photoresist and PMMA, washing copper foil, and drying in a nitrogen stream, and clamping and packaging the copper foil covered with or without transfer graphene by using an all-metal vacuum connection radial sealing joint. USE - The method is useful for manufacturing standard leak holes based on graphene membrane prepared by transfer-free technology. ADVANTAGE - The quality of graphene itself is an important factor affecting the graphite alkenyl standard drain hole, the graphene does not undergo any transfer process after firing and forming, which can furthest ensure the quality. The standard leakage flow guide of the invention is accurate and controllable, the bottom leakage rate is low, the service life is long, and it can provide more accurate controllability leakage rate in the larger pressure range. Since the full metal seal is used, the floor drain rate of the standard drain holes can be reduced to the maximum extent. The graphene has enough mechanical strength, the flow guide always keeps constant under the atmospheric pressure, that is, the gas flow through the standard drains hole is in the molecular flow state under atmospheric pressure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of encapsulation of a transfer-free graphene film using an all-metal vacuum-connected radially sealed joint. Inner screw thread nut (5) Connecting pipe (6) Graphite alkene punching copper foil (7) Outer screw thread nut (8)