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  • 专利标题:   Laminated body for electronic element, comprises silicon carbide, base portion having a first surface which is silicon surface and second surface which is surface opposite to side where base portion is located and arranged on first surface.
  • 专利号:   JP2021169167-A
  • 发明人:   MIHASHI F, YONEMURA T, ADACHI M, YAMAMOTO Y, TATENO Y
  • 专利权人:   SUMITOMO ELECTRIC IND LTD
  • 国际专利分类:   B32B009/00, H01L021/336, H01L029/16, H01L029/78, H01L029/786, H01L051/05, H01L051/30
  • 专利详细信息:   JP2021169167-A 28 Oct 2021 B32B-009/00 202195 Pages: 17 Japanese
  • 申请详细信息:   JP2021169167-A JP072662 15 Apr 2020
  • 优先权号:   JP072662

▎ 摘　　要

NOVELTY - Laminated body comprises silicon carbide and base portion (12) having a first surface (12A) which is a silicon surface and second surface which is a main surface opposite to the side where the base portion is located and arranged on the first surface, graphene film (13) to be formed, third surface which is a main surface opposite to the side on which the graphene film is located, contains silicon, and oxide film arranged on the second surface (13A) and the oxide film are located and laminate having a fourth surface, which is a main surface opposite to the side to be surfaced and insulating film arranged on the third surface (21A). USE - Laminated structure used for electronic device such as transistor. ADVANTAGE - The laminated body has high electrical property and high modulation characteristics, and efficiently manufactures an electronic device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an electronic element, which comprises silicon carbide and base portion having a first surface which is a silicon surface and a second surface which is a main surface opposite to the side where the base portion is located and arranged on the first surface, oxide film having a third surface which is a main surface opposite to the side on which the graphene film is located, containing silicon, and arranged on a portion of the second surface, laminate having a fourth surface, which is a main surface opposite to the side on which the oxide film is located, and an insulating film arranged on the third surface, and the above-mentioned on the second surface, first electrode, which is arranged at a position different from the position where the oxide film is arranged, and the position on the second surface, which is different from the position where the oxide film is arranged, are arranged apart from the first electrode and second electrode to be formed and a third electrode arranged on the fourth surface. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a laminated body. Base portion (12) First surface (12A) Graphene film (13) Second surface (13A) Third surface (21A)