▎ 摘　　要

NOVELTY - Producing pellicle, involves (a) forming a primary capping layer on one surface of the substrate, (b) forming a bonding layer comprising an amine group on the primary capping layer, (c) forming a core layer on the bonding layer comprising the amine group, and (d) forming a secondary capping layer over the core layer. The core layer is a carbon layer including a graphene layer, a carbon nanotube layer, and a graphene nanoplate layer. The bonding layer comprising amine group includes polyethyleneimine, polyallylamine hydrochloride or polyaniline. USE - The method is useful in producing pellicle for extreme ultraviolet lithography (claimed). ADVANTAGE - The method provides pellicle has improved bonding strength between capping layer and core layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for pellicle comprising a primary capping formed on one surface of the substrate, a bonding layer comprising an amine group formed on the primary capping layer, a core layer formed on the bonding layer comprising amine group, a secondary capping layer formed over the core layer. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating a method for producing pellicle (Drawing includes non-English language text).