▎ 摘　　要

NOVELTY - A graphene enhanced infrared photodetector based on phonon excitation comprises silicon substrate, silicon dioxide layer, graphene layer and molybdenum trioxide micro-nano structure array overlying graphene layer, and electrode. The molybdenum trioxide micro-nanostructure array and graphene layer form phonon-excited heterostructure. The electrode arranged above edge of graphene layer extends to an overlap region of molybdenum trioxide micro-nano structure array and graphene layer. USE - Graphene enhanced infrared photodetector based on phonon excitation. ADVANTAGE - The photodetector has improved photoelectric conversion efficiency with simple and economical process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for preparation of Graphene enhanced infrared photodetector based on phonon excitation, which involves preparing and cleaning heavily positive-doped silicon substrate having silicon dioxide layer, uniformly coating poly(methyl methacrylate) on copper foil, drying, sticking thermal interpretation tape to surface of graphene coated with poly(methyl methacrylate), and immersing in ferric chloride solution, removing thermal interpretation tape of graphene adhered to ferric chloride solution, washing, drying, and heating to de-interpret, removing poly(methyl methacrylate) on graphene-containing silicon substrate, washing, drying, and patterning molybdenum trioxide film on another silicon substrate by ion etching, and etching into one-dimensional or two-dimensional periodic micro or nano structure, uniformly coating polystyrene film on molybdenum trioxide array prepared, drying and attaching thermal interpretation tape to the surface of the polystyrene film, and then slowly tearing it with aid of water molecules, heating and tearing off thermal interpretation tape covered on graphene surface with molybdenum trioxide, removing polystyrene on silicon wafer, and performing electron beam evaporation of titanium and gold, removing remaining photoresist with acetone solution to form metal electrode.