▎ 摘　　要

NOVELTY - The sensor has a capacitive pressure sensor microstructure dielectric layer that is composed of a capacitive pressure sensor microstructure dielectric layer polydimethylsiloxane (PDMS) substrate and a PDMS conical microstructure on its surface. A radial line is formed by every three PDMS conical microstructures. Every ten of the radiating straight lines are arranged in a circular radial shape. Four air gaps (8) are provided, and each air gap is located between two temperature sensor silver electrodes and humidity sensor silver electrodes. The four air gaps in a microstructure dielectric layer of capacitive pressure sensor together with the PDMS substrates above and below it is used as the dielectric of the four capacitive pressure sensors. The PDMS packaging layer is mainly used for packaging humidity sensors. The four openings are provided on the PDMS encapsulation layer, and the position and size of each opening are the same as the GO humidity sensitive unit (10) directly below it. USE - Graphene-based high-sensitivity flexible multifunctional sensor for monitoring individual blood pressure, body temperature, humidity and limb activity and health parameters. Uses include but are not limited to human body skin or tissue, electronic skin, wearable medical device, man-machine interaction and soft robot. ADVANTAGE - The structure layout of the sensor is reasonable, safe and reliable, high flexibility, comfortable wearing, high sensitivity, low crosstalk between array units, simple preparation technique, low development cost, and non-coupling, without complex algorithm for signal decoupling. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of graphene-based high sensitive flexible multifunctional sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a vertical three-dimensional structure schematic diagram of the flexible multifunctional sensor. 1Temperature sensor pdms substrate 2Capacitive pressure sensor micro-structure dielectric layer PDMS substrate 3Humidity sensor pdms substrate 4Pdms packaging layer 5Temperature sensor silver electrode 6Rgo temperature sensitive unit 7Large pdms conical micro-structure 8Air gap 10Go humidity sensitive unit 11Pdms packaging layer window