• 专利标题:   Electronic apparatus has first conductor layer which is composed of metal atom provided facing first terminal portion of graphene and bonded with carbon atom of first terminal portion through first atom different from carbon atom.
  • 专利号:   JP2016076542-A, JP6476708-B2
  • 发明人:   JIPPO H
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   H01L021/28, H01L029/06, H01L029/417, H01L029/786, H01L051/05, H01L051/30, H01L051/40
  • 专利详细信息:   JP2016076542-A 12 May 2016 H01L-029/786 201636 Pages: 23 English
  • 申请详细信息:   JP2016076542-A JP204675 03 Oct 2014
  • 优先权号:   JP204675

▎ 摘  要

NOVELTY - The apparatus has a first conductor layer which is composed of metal atom which is provided facing the first terminal portion of a graphene (110), and is bonded with the carbon atom of the first terminal portion through first atom different from a carbon atom. The first atom is an oxygen atom (140a,140b) or a sulfur atom. The first conductor layer is physically absorbed to region inside first terminal portion of the graphene. The second conductor layer containing the metal atom is bonded with carbon atom of a second terminal portion (110b) through second atom different from carbon atom. USE - Electronic apparatus. ADVANTAGE - The electronic apparatus which suppressed the fall of the electron mobility of a graphene and the increase of the contact resistance of a graphene and a conductor layer at the time of a connection with a conductor layer is achieved. The fall of the electron mobility of the graphene whole and increase of sheet resistance are suppressed. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of electronic apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating the formation process of the source electrode. Transistor (100A) Graphene (110) Second terminal portion (110b) Drain electrode (130b) Oxygen atom (140a,140b)