• 专利标题:   Method for growing flat graphene with uniform layer thickness, comprises e.g. pyrolyzing silicon carbide on silicon carbide wafer under ultra-high vacuum conditions by controlling temperature of silicon carbide wafer.
  • 专利号:   CN112919456-A
  • 发明人:   ZHANG Y, JIN S, WANG C
  • 专利权人:   UNIV NANJING
  • 国际专利分类:   C01B032/188
  • 专利详细信息:   CN112919456-A 08 Jun 2021 C01B-032/188 202154 Pages: 12 Chinese
  • 申请详细信息:   CN112919456-A CN10202823 23 Feb 2021
  • 优先权号:   CN10202823

▎ 摘  要

NOVELTY - Method for growing flat graphene with a uniform layer thickness, comprises pyrolyzing the silicon carbide on a silicon carbide wafer under ultra-high vacuum conditions by controlling the temperature of the silicon carbide wafer, and pyrolyzing the silicon carbide in a nitrogen plasma atmosphere to grow a graphene film. USE - The method is useful for growing flat graphene with uniform layer thickness. ADVANTAGE - The method is precise. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for single-layer or double-layer graphene film obtained by the method of growing a flat graphene with a uniform layer thickness.