• 专利标题:   Graphene transfer method using electromagnetic levitation, comprises annealing graphene thin film in levitation state, and transferring by contacting the graphene thin film and a substrate in levitation state.
  • 专利号:   KR2014022489-A, KR1446069-B1
  • 发明人:   JOO I L, WONDONG K, JUNG H K, CHAN Y H, YONG H S
  • 专利权人:   KOREA RES INST STANDARDS SCI
  • 国际专利分类:   C23C016/26, H01L021/205
  • 专利详细信息:   KR2014022489-A 25 Feb 2014 C23C-016/26 201418 Pages: 9
  • 申请详细信息:   KR2014022489-A KR088126 13 Aug 2012
  • 优先权号:   KR088126

▎ 摘  要

NOVELTY - Graphene transfer method using electromagnetic levitation, comprises annealing graphene thin film in levitation state, and transferring by contacting the graphene thin film and a substrate in levitation state. USE - The method is useful for graphene transfer using electromagnetic levitation (claimed). ADVANTAGE - The method achieves the transfer of high-purity graphene thin film without chemical substance contamination as seen in the existing chemical transfer method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic process flow for graphene transfer using electromagnetic levitation.