• 专利标题:   Tooling system for chemical vapor deposition for transferring graphene film, comprises base plate that is fixedly connected with column, spacer, and cover unit including liquid containing fixture and hopper.
  • 专利号:   CN104451595-A, CN104451595-B
  • 发明人:   SHAO L, SHI H, YU J, ZHANG P, ZHONG D
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   C23C016/01, C23C016/26
  • 专利详细信息:   CN104451595-A 25 Mar 2015 C23C-016/26 201535 Pages: 9 Chinese
  • 申请详细信息:   CN104451595-A CN10754784 11 Dec 2014
  • 优先权号:   CN10754784

▎ 摘  要

NOVELTY - The tooling system comprises a base plate (1) that is fixedly connected with a column (2), a spacer (3), and a cover unit (4) including liquid containing fixture and hopper (5). The spacer is fixed through the column for isolating graphene film support layer. The cover plate is placed on top surface of the fixed column, where a jig is provided for preventing etching of the catalytic substrate in an etching solution. The liquid filling hopper includes a main housing and a fixed housing on upper surface of the plate. USE - Tooling system for chemical vapor deposition for transferring graphene film. ADVANTAGE - The tooling system catalyzes growth of multiple graphene film substrate simultaneously, and improves production efficiency. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic plan view of the tooling system. Base plate (1) Column (2) Spacer (3) Cover unit (4) Hopper (5)