▎ 摘 要
NOVELTY - The tooling system comprises a base plate (1) that is fixedly connected with a column (2), a spacer (3), and a cover unit (4) including liquid containing fixture and hopper (5). The spacer is fixed through the column for isolating graphene film support layer. The cover plate is placed on top surface of the fixed column, where a jig is provided for preventing etching of the catalytic substrate in an etching solution. The liquid filling hopper includes a main housing and a fixed housing on upper surface of the plate. USE - Tooling system for chemical vapor deposition for transferring graphene film. ADVANTAGE - The tooling system catalyzes growth of multiple graphene film substrate simultaneously, and improves production efficiency. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic plan view of the tooling system. Base plate (1) Column (2) Spacer (3) Cover unit (4) Hopper (5)