• 专利标题:   Method of forming switch e.g. graphene-containing switch for use as select device in memory device e.g. memory array, involves electrically coupling graphene structure with exposed portion of bottom electrode.
  • 专利号:   US2013029460-A1, WO2013015935-A2, US8394682-B2, WO2013015935-A3, TW201320130-A, KR2014050676-A, CN103703563-A, EP2742530-A2, JP2014524157-W, TW446384-B1, SG201400548-A1, SG201400548-B, KR1563829-B1, JP5887408-B2, CN103703563-B, EP2742530-A4, EP2742530-B1
  • 发明人:   SANDHU G S, SANDHU G
  • 专利权人:   MICRON TECHNOLOGY INC, MICRON TECHNOLOGY INC, MICRON TECHNOLOGY INC, MICRON TECHNOLOGY INC
  • 国际专利分类:   H01L021/768, H01L027/02, H01L021/82, H01G009/28, H01L045/00, H01L051/05, H01L051/30, H01L021/336, H01L023/525, H01L023/532, H01L029/06, H01L029/16, H01L029/778, H01L029/786
  • 专利详细信息:   US2013029460-A1 31 Jan 2013 H01L-021/768 201311 Pages: 23 English
  • 申请详细信息:   US2013029460-A1 US191192 26 Jul 2011
  • 优先权号:   US191192, KR704393

▎ 摘  要

NOVELTY - The method involves forming an electrically conductive structure (108) over a bottom electrode (16) formed on base (14). A dielectric material (104) is formed along a sidewall of electrically conductive structure such that a portion of bottom electrode is covered and while other portion of bottom electrode is exposed. Another electrically conductive structure (110) is formed on a graphene structure electrically coupled with the exposed portion of bottom electrode. A top electrode (18) is electrically coupled with electrically conductive structures. USE - Method of forming switch e.g. graphene-containing switch for use as select device in memory device e.g. memory array. ADVANTAGE - The switches can be formed effectively so as to utilize as select devices in memory devices. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view explaining the process for forming switch. Base (14) Bottom electrode (16) Top electrode (18) Dielectric materials (102,104,124) Electrically conductive structures (108,110)