▎ 摘 要
NOVELTY - Production (AA) of graphene involves decomposing carbon-containing gas (S62) with low reactivity in a space which opposes a substrate, and decomposing carbon-containing gas (S63) with high reactivity in the space. USE - Production of graphene used for wiring film of three-dimensional stacked memory. ADVANTAGE - The method enables production of graphene having high domain size, with suppressed number of core of graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart explaining production of graphene. (Drawing includes non-English language text) Production of graphene (AA) End of the reaction (BB) Activation process (S61) Carbon-containing gas with low reactivity (S62) Carbon-containing gas with high reactivity (S63)