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  • 专利标题:   Production of graphene for wiring film of three-dimensional stacked memory, involves decomposing carbon-containing gas with low reactivity in space which opposes substrate, and decomposing carbon-containing gas with high reactivity.
  • 专利号:   WO2014192956-A1, JP2014231455-A, KR2016011638-A, US2016075560-A1, JP6002087-B2, US9822009-B2
  • 发明人:   KAGAYA M, MATSUMOTO T, NISHIDE D
  • 专利权人:   TOKYO ELECTRON LTD, TOKYO ELECTRON LTD
  • 国际专利分类:   C01B031/02, C01B031/04, C23C016/26, C23C016/50, C01B032/186, C23C016/02, C23C016/452, C23C016/455
  • 专利详细信息:   WO2014192956-A1 04 Dec 2014 C01B-031/02 201482 Pages: 37 Japanese
  • 申请详细信息:   WO2014192956-A1 WOJP064564 27 May 2014
  • 优先权号:   JP112928

▎ 摘　　要

NOVELTY - Production (AA) of graphene involves decomposing carbon-containing gas (S62) with low reactivity in a space which opposes a substrate, and decomposing carbon-containing gas (S63) with high reactivity in the space. USE - Production of graphene used for wiring film of three-dimensional stacked memory. ADVANTAGE - The method enables production of graphene having high domain size, with suppressed number of core of graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart explaining production of graphene. (Drawing includes non-English language text) Production of graphene (AA) End of the reaction (BB) Activation process (S61) Carbon-containing gas with low reactivity (S62) Carbon-containing gas with high reactivity (S63)