▎ 摘　　要

NOVELTY - The microphone has a substrate whose top portion is formed with a front and rear through groove. Left and right sides of a substrate are formed with two lug bosses. A heat insulating layer is arranged on two lug boss, and are arranged with an electrode. A heat conducting layer is supported by the heat insulating layer to be suspended on the through groove. A heating resistor and a sensing resistor are arranged on the heat conducting layer, and are connected with the electrode, where the sensing resistor generates temperature difference when sound wave introduces mass point vibration speed to cause a space temperature field to generate forced convection disturbance to demodulate resistance difference by a bridge circuit to measure sound field mass point vibration speed. USE - Micro-electro-mechanical system (MEMS) vector microphone used for measuring sound field mass point vibration speed. Can also be used in application research of vibration and noise control, sound source target identification and location. ADVANTAGE - The microphone improves sensitivity in a low frequency band, and reduces distortion on receiving and subsequent processing due to response characteristic attenuation in low frequency and high frequency bands. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a MEMS vector microphone manufacturing method.