▎ 摘　　要

NOVELTY - A three-dimensional (3D) polymeric microstructure is fabricated by 3D-printing a metallic mold, where the metallic mold includes a mold cavity corresponding to 3D polymeric microstructure, polymer casting in metallic mold by inserting a liquid polymer into the mold cavity, curing the liquid polymer inside the metallic mold, and etching the metallic mold away from the cured polymer, where the polymeric microstructure comprises a soft polymeric microelectromechanical systems, Microelectromechanical systems (MEMS), device, and soft polymeric MEMS device comprises greater than or equal to 1 sensor. USE - Fabrication of three-dimensional (3D) polymeric microstructure (claimed). ADVANTAGE - The use of a metallic mold may improve the stability of the mold, especially when printing complex microstructures. Once the polymer is cured, the metal mold can be etched away, leaving the complex polymeric microstructure. The use of multiple polymers, such as polymers with different physical properties, may enable the fabrication of certain complex microstructures. Flow sensing capabilities are improved and biologically inspired flow sensors with high signal-to-noise ratios are obtained. Low wall thickness may result in a faster etching process.