• 专利标题:   Ultra-high sensitivity surface acoustic wave humidity sensor, has sensor main body provided with piezoelectric substrate, interdigital electrode and graphene oxide-zinc oxide nanowire-graphene quantum dot composite structure sensitive layer.
  • 专利号:   CN113219050-A, CN113219050-B
  • 发明人:   ZHOU J, WU J, DUAN H, LIU K, JI Z
  • 专利权人:   UNIV HUNAN
  • 国际专利分类:   G01N029/00, B82Y030/00, B82Y040/00
  • 专利详细信息:   CN113219050-A 06 Aug 2021 G01N-029/00 202169 Pages: 7 Chinese
  • 申请详细信息:   CN113219050-A CN10766441 07 Jul 2021
  • 优先权号:   CN10766441

▎ 摘  要

NOVELTY - The sensor has a sensor main body provided with a piezoelectric substrate, an interdigital electrode and a graphene oxide-zinc oxide nanowire-graphene quantum dot composite structure sensitive layer. Thickness of the interdigital electrode is about 0.1-0.3 millimeter. Thickness of the graphene oxide-zinc oxide nanowire-graphene quantum dot composite structure sensitive layer is about 0.1-0.3 millimeter. USE - Used as a ultra-high sensitive surface acoustic wave humidity sensor. ADVANTAGE - The sensor is simple in structure and easy to detect, and has high sensitivity, and determines relative humidity interval for about 45-50% to reach 148.61% RH. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a ultra-high sensitivity surface acoustic wave humidity sensor.