• 专利标题:   Electron source for generating electron beam with cathode and anode in form of graphene layer, comprises substrate of cathode, which includes silicon carbide, and graphene layer is grown epitaxially with silicon carbide of substrate.
  • 专利号:   DE102019123248-A1, WO2021037481-A1, CN114521282-A, EP4022663-A1, US2022406556-A1
  • 发明人:   WEBER H, KRIEGER M, OTT C
  • 专利权人:   UNIV ERLANGENNUERNBERG, UNIV ERLANGENNUERNBERG, UNIV ERLANGENNUERNBERG
  • 国际专利分类:   H01J001/02, H01J001/30, H01J029/04, H01J001/304, H01J001/316, H01J001/38, H01J003/02, H01J035/06, H01J035/02
  • 专利详细信息:   DE102019123248-A1 04 Mar 2021 H01J-001/02 202123 Pages: 14 German
  • 申请详细信息:   DE102019123248-A1 DE10123248 29 Aug 2019
  • 优先权号:   DE10123248, CN80067855

▎ 摘  要

NOVELTY - The electron source (2) comprises a substrate (5) of the cathode (1), which includes silicon carbide. The cathode includes a graphene layer (6), which is grown epitaxially with the silicon carbide of the substrate. The electron source has an anode, which has a graphene layer (12). The anode (4) is arranged on a substrate, which includes silicon carbide. The cathode and the anode are arranged on the same substrate. The anode includes a second substrate. The graphene layer of the cathode is arranged in such a way that electrons are emitted at an edge (3) of the graphene layer of the cathode in order to be accelerated towards the anode. USE - Electron source for generating an electron beam with a cathode and an anode in the form of graphene layer. ADVANTAGE - Silicon carbide has good high voltage strength. The processes for manufacturing silicon carbide on an industrial scale are available. The silicon carbide can be achieved with electrical potential differences of a some kilovolts as required for an electron source. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for generating an electron beam. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of electron source for generating an electron beam with a cathode. Cathode (1) Electron source (2) Edge (3) Anode (4) Substrate (5) Graphene layer (6) Graphene layer (12)