▎ 摘　　要

NOVELTY - The element has a carbon nano tube coated on a substrate. The substrate is comprised with polycrystalline silicon and polymer, where the polymer is formed as a graphene adhesive material. USE - Chemical mechanical grinding element for semiconductor manufacturing. ADVANTAGE - The element introduces carbon nano-tube in the substrate, and improves production efficiency and heat conductivity, and conducts heat generated in grinding process in time, and avoids influence of heat to the grinding processes to improve uniformity of a wafer surface and low occurrence and loss of membrane, and prolongs service life of an element sheet, and simplifies technical process to control and better performances. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing a chemical mechanical grinding element.