• 专利标题:   Graphite alkene interconnection, has insulation base plate formed with graphene layer and copper electric conduction layer, where insulation base plate is formed as polyethylene terephthalate or silicon /silicon dioxide substrate.
  • 专利号:   CN103943562-A
  • 发明人:   XU Y, LUO J, YU B, REN Z
  • 专利权人:   UNIV ZHEJIANG
  • 国际专利分类:   H01L021/768, H01L023/522
  • 专利详细信息:   CN103943562-A 23 Jul 2014 H01L-021/768 201468 Pages: 5 Chinese
  • 申请详细信息:   CN103943562-A CN10194398 09 May 2014
  • 优先权号:   CN10194398

▎ 摘  要

NOVELTY - The interconnection has an insulation base plate (1) formed with a graphene layer (2) and a copper electric conduction layer (3). The insulation base plate is formed as a polyethylene terephthalate (PET) or silicon (Si)/silicon dioxide (Si02) substrate. USE - Graphite alkene interconnection. ADVANTAGE - The interconnection reduces thickness of a diffusion barrier layer so as to form a device with reduced size. The interconnection increases surface roughness of the electric conduction layer so as to increase conductance. The interconnection utilizes the graphene layer as a metalized layer and the electric conduction layer as the diffusion barrier layer, so that interconnection preparing process can be simplified. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphite alkene interconnection preparing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphite alkene interconnection. Insulation base plate (1) Graphene layer (2) Copper electric conduction layer (3)