• 专利标题:   Graphene nanometer belt preparing method, involves cleaning silicon carbide wafer to remove pollutant on surface, and heating to specific degrees centigrade and specific constant temperature time.
  • 专利号:   CN102655080-A, CN102655080-B
  • 发明人:   GUO H, LEI T, ZHANG Y, ZHANG K, ZHANG F, ZHAO Y
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   H01L021/04
  • 专利详细信息:   CN102655080-A 05 Sep 2012 H01L-021/04 201304 Pages: 6 Chinese
  • 申请详细信息:   CN102655080-A CN10151563 16 May 2012
  • 优先权号:   CN10151563

▎ 摘  要

NOVELTY - The method involves cleaning a silicon carbide wafer to remove pollutant on a surface, and heating to 1200-1300 degrees centigrade at a constant temperature time of 30-90 minutes. A carbon film is deposited on a copper film at a flow speed of 30-150 ml/min and annealed at 900-1200 degrees centigrade for 10-20 minutes when the carbon film is attached to the copper film on the formed graphene nanometre belt, such that the belt is conneceted to the open copper film. USE - Graphene nanometer belt preparing method for manufacturing a semiconductor device. ADVANTAGE - The method enables preparing the belt in a simple and safe manner with reduced injection region, smooth surface and better continuity. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of a graphene nanometer belt. '(Drawing includes non-English language text)'