▎ 摘 要
NOVELTY - Manufacturing metal supporting graphene separation film comprises (i) growing graphene film on metal substrate, and forming graphene film-metal composite structure; (ii) adding micro-nanopores into the graphene film on graphene film-metal composite structure; (iii) adhering protective film with micropores on the metal of graphene film-metal composite structure; and (iv) etching the metal with no protective film on the metal side of the graphene film-metal composite structure, so the metal side forms micropores consistent with the preset micropores on the protective film, so the microporous area only has the graphene film with micro/nanopores. USE - The method is useful for manufacturing metal supporting graphene separation film. ADVANTAGE - The film isolates dust on one side of the getter chamber, and eliminates the influence of dust on the vacuum cavity of the laser device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for metal supporting graphene separation film, comprising a metal substrate and a graphene film grown on metal substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the method for manufacturing metal supporting graphene separation film (Drawing includes non-English language text).