• 专利标题:   Graphene growth system useful for controlling laser cold wall environment, comprises reaction chamber connected to the gas supply system.
  • 专利号:   CN107381554-A
  • 发明人:   HU Y, WANG Z
  • 专利权人:   HU Y, WANG Z, XIAN XINGMEN LOW DIMENSIONAL NANOMATERIALS CO LTD
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN107381554-A 24 Nov 2017 C01B-032/186 201803 Pages: 7 Chinese
  • 申请详细信息:   CN107381554-A CN10498531 27 Jun 2017
  • 优先权号:   CN10498531

▎ 摘  要

NOVELTY - Graphene growth system comprises a reaction chamber. The reaction chamber is connected to the gas supply system, and the other end is connected with the turbine pump and a quadrupole mass spectrometer. The reaction chamber is provided with the laser heater, outside of the reaction chamber is provided with a laser generator. The laser emitted by the laser generator is through the optical fiber of the cavity wall into the laser heater and irradiating the graphene growth area. The graphene growth system further comprises associated bidirectional feedback system. USE - The system is useful for controlling laser cold wall environment (claimed). ADVANTAGE - The system realizes accurate control of graphene growth parameters. DETAILED DESCRIPTION - Graphene growth system comprises a reaction chamber (3). The reaction chamber is connected to the gas supply system, and the other end is connected with the turbine pump (9) and a quadrupole mass spectrometer (10). The reaction chamber is provided with the laser heater (4), outside of the reaction chamber is provided with a laser generator. The laser emitted by the laser generator is through the optical fiber of the cavity wall into the laser heater and irradiating the graphene growth area. The graphene growth system further comprises associated bidirectional feedback system (11). The associated bidirectional feedback system is connected between the quadrupole mass spectrometer and a gas supply system for receiving the collected signal of the quadrupole mass spectrometer and provided to the air supply system to facilitate real time adjusting the intake flow to accurately control graphene growth parameters. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the. Reaction chamber (3) Laser heater (4) Turbine pump (9) Quadrupole mass spectrometer (10) Associated bidirectional feedback system (11)