• 专利标题:   Graphene device structure contact electrode preparation method, involves structure section arranged on linear graphene edge, depositing metal covered with section structure, and one-dimensional graphene connected with metal electrode.
  • 专利号:   CN105070347-A, CN105070347-B
  • 发明人:   DENG L, HE L, JIANG M, LI L, XIE X, ZHANG D, XIE H, WANG H, CHEN L
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01B001/04, H01G009/042, H01L021/28, H01L039/12, H01L039/24
  • 专利详细信息:   CN105070347-A 18 Nov 2015 H01B-001/04 201601 Pages: 20 English
  • 申请详细信息:   CN105070347-A CN10504332 17 Aug 2015
  • 优先权号:   CN10504332

▎ 摘  要

NOVELTY - The method involves connecting four substrates with a polydimethylsiloxane film. A poly propylene carbon thin film is arranged on an h-BN thin film by the first substrate. A poly-propylene-carbon -h-BN graphite structure is arranged on the first substrate using the polydimethylsiloxane film. A graphene electrode is formed as the graphite structure. A structure section is arranged on a linear graphene edge and an h-BN-graphite-molybdenum-disulfide-h-BN section structure. A depositing metal is covered with the section structure. A one-dimensional graphene is connected with a metal electrode. USE - Graphene device structure contact electrode preparation method. ADVANTAGE - The method enables maintaining graphene carrier migration rate and absorbing oxygen, water, fine particles and air so as to increase electrical performance using graphene and greatly reduce contact resistance of a superconducting/semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene device structure contact electrode.