▎ 摘　　要

NOVELTY - The method involves using the mesh screen as the growth substrate, and is placed in the heating area of the plasma-enhanced chemical vapor deposition system after cleaning. The mesh screen coated with the flexible polymer elastic material is cut, and the mesh screen substrate is removed by etching according to the use requirements and the base material, and the metal mesh needs to be removed by etching to ensure the flexibility of the sensing material, if the substrate is a metal mesh. The mesh screen is omitted, if the substrate is a non-metal stretchable mesh screen. The polymer elastic material is polydimethylsiloxane, copolyester series silicone, parylene, polyetherimide, butyl rubber, thermoplastic polyurethane rubber, polyurethane. The three-dimensional two-dimensional materials are graphene, carbon nanotube, tungsten disulfide, and molybdenum disulfide. The precursor gas is hydrogen, methane, acetylene, and oxygen. The precursor is molybdenum oxide, sulfur and tungsten oxide. USE - Method for manufacturing flexible strain sensor used for detecting human body motion, detecting personalized health and electronic skin. ADVANTAGE - The flexible strain sensor has good ductility, high sensitivity, wide detection range, and improved mechanical property and strain concentration effect of the net structure. The sensitive tensile response is generated, the detection of the small strain of the sensing material is realized, the sensitivity and mechanical properties of the strain sensing material is improved, and a wider range of strain response is realized. DESCRIPTION OF DRAWING(S) - The drawing shows a circuit diagram of the signal processing end. (Drawing includes non-English language text). Resistors (R1, R2, R3)