• 专利标题:   High-response ferroelectric integrated graphene plasma terahertz detector used in photoelectric communication, has substrate which is made of strontium titanate, and bottom electrode, bismuth ferrite layer, and two parallel rectangular local area polarization domains which are provided.
  • 专利号:   CN114038927-A
  • 发明人:   ZHANG X, YAN B, JIANG C, LIN Y, GONG T, SUN R, HUANG W
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H01L031/0236, H01L031/0328, H01L031/101
  • 专利详细信息:   CN114038927-A 11 Feb 2022 H01L-031/0328 202222 Chinese
  • 申请详细信息:   CN114038927-A CN11451036 01 Dec 2021
  • 优先权号:   CN11451036

▎ 摘  要

NOVELTY - The detector has a substrate which is made of strontium titanate, and a bottom electrode which is made of lanthanum-strontium-manganese-oxygen. A layer of bismuth ferrite (BFO) is grown on bottom electrode by epitaxial method. Two parallel rectangular local area polarization domains are obtained by piezoelectric force microscope or watermark method. A layer of intrinsic graphene is covered on the BFO layer, and a different gate voltage is applied to the bottom electrode to adjust graphite alkene chemical potential covered on the rectangular local polarization electric domain, so as to adjust the absorption band of the terahertz detector. USE - High-response ferroelectric integrated graphene plasma terahertz detector used in photoelectric communication. ADVANTAGE - The detector solves problem of difficult electromagnetic wave conduction between parallel graphene nanoribbons in existing silicon-based devices. The coupling of plasmon effects excited by two graphene nanoribbons with high chemical potential is realized. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the simulation device and BFO domain.