▎ 摘 要
NOVELTY - The grating has a substrate (1) provided with a ridge chalcogenide glass light waveguide that is provided with a ridge waveguide (2) and a ridge rectangular waveguide (14). The ridge waveguide is covered with a covering layer (3), a first graphene layer (6), a first isolation dielectric layer (5) and a second isolation dielectric layer (8). The first graphene layer and a second graphene layer (9) are coated on an interdigital electrode structure. The interdigital electrode structure is provided with a fork along light transmission direction. USE - Graphene integrated infrared tunable waveguide grating. ADVANTAGE - The purpose is to improve the infrared grating tunable wavelength range is narrow, and the response speed is slow, the waveguide grating of the same structure under different electric field conditions, wave has different selectivity, altering the grating reflection wavelength. DETAILED DESCRIPTION - The chalcogenide glass ridge light guide made of arsenic triselenide and arsenic trisulfide. The insulating layer is silicon oxide, silicon nitrogen oxide or boron nitride. The interdigital electrode structure is made of gold, silver, platinum or copper. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a graphene integrated infrared tunable waveguide grating. Substrate (1) Ridge waveguide (2) Covering layer (3) Isolation dielectric layers (5, 8) Graphene layers (6, 9) Ridge rectangular waveguide (14)