▎ 摘　　要

NOVELTY - Manufacture of graphene-grown substrate involves forming a metal layer on the surface of a substrate, supplying a gas containing carbon and etching gas, performing electron cyclotron resonance microwave plasma enhanced chemical vapor deposition, growing graphene on metal layer, performing electron cyclotron resonance microwave plasma enhanced chemical vapor deposition constantly, removing metal and growing graphene on substrate free of metal layer. USE - Manufacture of graphene-grown substrate for manufacturing electronic component (all claimed). DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene-grown substrate; (2) manufacturing device of graphene-grown substrate; and (3) manufacture of electronic component.