▎ 摘　　要

NOVELTY - The circuit has a co-planar waveguide (CPW) transmission line provided with a central signal line (2) i.e. signal output end and a first ground wire (3). An end of a micro-electro-mechanical system (MEMS) micro-cantilever beam (10) i.e. signal input end is fixed on a substrate (1) through an anchor region (11). An output end of an amplifier (14) is connected with an input end of the amplifier. The output end of the amplifier is connected to a metal feed line (9). A silicon dioxide layer (6) extends to a lower portion of an air bridge (5) through a silicon dioxide extending line (7). A graphene layer (8) is provided between the silicon dioxide layers. The silicon dioxide extension line is provided with metal feed lines (9) under a silicon nitride medium layer (12). The input end of a rectifier (13) and the anchor region are connected with each other. The output end of the rectifier is connected with the input end of the amplifier. USE - Micro-electro-mechanical system micro-cantilever beam and graphene co-planar waveguide transmission line based high-power automatic protection circuit. ADVANTAGE - The circuit has the MEMS micro-cantilever beam automatically couples portion input signal, generates control signal according to the size of the input power, adjusts the chemical formula of graphene and transmission coefficient of transmission line, realizes self-adaptive process and automatic high power protection function to the subsequent circuit, and performs adaptive protection according to the size of the input power. The circuit has high isolation degree in the low power state, small transmission loss, better microwave characteristic, and high reliability. The circuit is simple in structure, convenient for operation and compatible with Gallium arsenide single-chip microwave integrated circuit technology. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic block diagram of a micro-electro-mechanical system micro-cantilever beam and graphene co-planar waveguide transmission line based high-power automatic protection circuit in partial section. (Drawing includes non-English language text). Substrate (1) Central signal line (2) First ground wire (3) Second ground wire (4) Air bridge (5) Silicon dioxide layer (6) Silicon dioxide extending line (7) Graphene layer (8) Metal feed line (9) Mems micro-cantilever beam (10) Anchor region (11) Medium layer (12) Rectifier (13) Amplifier (14)