• 专利标题:   Pressure sensitive layer for piezoresistive pressure sensor, has pressure sensitive layer main body provided with graphene material and polymer elastomer that covers hole on outer side of graphene material.
  • 专利号:   CN206740283-U
  • 发明人:   ZHANG M, WANG X, LIU Y, LIANG J, WU Y
  • 专利权人:   UNIV TSINGHUA SHENZHEN GRADUATE SCHOOL
  • 国际专利分类:   G01L001/22, G01L009/04
  • 专利详细信息:   CN206740283-U 12 Dec 2017 G01L-001/22 201802 Pages: 10 Chinese
  • 申请详细信息:   CN206740283-U CN20424963 21 Apr 2017
  • 优先权号:   CN20424963

▎ 摘  要

NOVELTY - The utility model claims a pressure sensitive layer and a piezoresistive pressure sensor and a piezoresistive pressure sensor array, the pressure sensitive layer comprises a graphene material and a polymer elastomer, said graphite alkene material is loose and porous and has micro-structure array, the polymer elastic body covers each hole and penetrate into the graphene material outside of the graphene material. The piezoresistive pressure sensor comprises a first electrode plate and a second electrode plate, and at least one layer to the pressure sensitive layer between the first electrode plate and the second electrode plate are bonded to each other, and the micro-structure array of the micro structure and the first electrode plate and/or of the electrode in contact with the second electrode plate. the piezoresistive pressure sensor of the utility model can make the external pressure into the resistance value of the sensor so as to sense the change of the external pressure by the change of the electric signal, with high sensitivity, low cost, high flexibility, easy processing, easy to array and miniaturized.