国家/地区 Germany（2）
关键词
出版物
出版时间 2019（2）
机构
作者 FURSENKO O（2）

Diagnostic of graphene on Ge(100)/Si(100) in a 200mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry

JOURNAL OF VACUUM SCIENCE TECHNOLOGY B

FURSENKO O, LUKOSIUS M, BAUER J, VILLRINGER C, LUX H, BARWOLF F, LISKER M, MAI A

Processing and integration of graphene in a 200 mm wafer Si technology environment

MICROELECTRONIC ENGINEERING

LISKER M, LUKOSIUS M, FRASCHKE M, KITZMANN J, DABROWSKI J, FURSENKO O, KULSE P, SCHULZ K, KRUGER A, DREWS J, SCHULZE S, WOLANSKY D, SCHUBERT AM, KATZER J, STOLAREK D, COSTINA I, WOLFF A, DZIALLAS G, COCCETTI F, MAI A