国家/地区
关键词
出版物 ACS APPLIED NANO MATERIALS（2）
出版时间 2023（2）
机构
作者 LEE MH（2）

Intercalated Multilayer Graphene with Ultra Low Resistance for Next-Generation Interconnects

ACS APPLIED NANO MATERIALS

HUANG JZ, CHANG EC, TSAO PC, NI IC, LI SW, CHAN YC, YANG SY, LEE MH, SHUE SL, CHEN MH, WU CI

Graphene Capping of Cu Back-End-of-Line Interconnects Reduces Resistance and Improves Electromigration Lifetime

ACS APPLIED NANO MATERIALS

SHIN KW, CHO YC, NAM SG, JUNG AL, LEE EK, LEE CS, LEE MH, SHIN HJ, BYUN KE