| 国家/地区 | Japan(3) |
| 关键词 | |
| 出版物 | JAPANESE JOURNAL OF.(2) |
| 出版时间 |
2013(3)
|
| 机构 | NATL INST AD.(3) |
| 作者 |
NIHEI M(3)
|
MICROELECTRONIC ENGINEERING
SATO M, OGAWA S, INUKAI M, IKENAGA E, MURO T, TAKAKUWA Y, NIHEI M, YOKOYAMA N
JAPANESE JOURNAL OF APPLIED PHYSICS
KAWABATA A, MURAKAMI T, NIHEI M, YOKOYAMA N
JAPANESE JOURNAL OF APPLIED PHYSICS
SATO M, TAKAHASHI M, NAKANO H, MURO T, TAKAKUWA Y, SATO S, NIHEI M, YOKOYAMA N
