国家/地区 Korea（4）
关键词 GRAPHENE（2）
出版物 ACS APPLIED NANO MA.（2）
出版时间 2020（2）
机构
作者 SHIN KW（4）

Graphene-Based Etch Resist for Semiconductor Device Fabrication

ACS APPLIED NANO MATERIALS

KIM SW, SEOL M, CHO Y, SHIN KW, LEE D, JEONG SJ, LEE H, CHUNG JG, KIM HM, KIM KB, PARK S, SHIN HJ

Study of selective graphene growth on non-catalytic hetero-substrates

2D MATERIALS

SHIN KW, CHO Y, LEE Y, LEE H, NAM SG, BYUN KE, LEE CS, PARK S, SHIN HJ

Fabrication of Metal/Graphene Hybrid Interconnects by Direct Graphene Growth and Their Integration Properties

ADVANCED ELECTRONIC MATERIALS

LEE CS, SHIN KW, SONG HJ, PARK H, CHO Y, IM DH, LEE H, LEE JH, WON JY, CHUNG JG, KIM C, BYUN KE, LEE EK, KIM Y, KO W, LIM HJ, PARK S, SHIN HJ

Graphene Capping of Cu Back-End-of-Line Interconnects Reduces Resistance and Improves Electromigration Lifetime

ACS APPLIED NANO MATERIALS

SHIN KW, CHO YC, NAM SG, JUNG AL, LEE EK, LEE CS, LEE MH, SHIN HJ, BYUN KE