国家/地区
关键词 SHEET RESISTANCE(5)
出版物
出版时间 2019(5)
机构
作者

ACS APPLIED ELECTRONIC MATERIALS

RUHKOPF J, SAWALLICH S, NAGEL M, OTTO M, PLACHETKA U, KREMERS T, SCHNAKENBERG U, KATARIA S, LEMME MC

MICRO NANO LETTERS

BYRANVAND MM, TAJABADI F, MARDI S, TAGHAVINIA N, ZARANDI AA, DABIRIAN A

JOURNAL OF MICROMECHANICS MICROENGINEERING

ZHOU J, SHI XL, XIAO DB, WU XZ, ZHENG JP, LUO JK, ZHUO M, TAO X, JIN H, DONG SR, TAO R, DUAN HG, FU YQ