国家/地区 China（3）
关键词 GRAPHENE（3）
出版物
出版时间 2014（2）
机构 CHINESE ACAD.（2）
作者 CAO D（3）

Effects of rapid thermal annealing on properties of HfAlO films directly deposited by ALD on graphene

MATERIALS LETTERS

ZHENG L, CHENG XH, CAO D, WANG ZJ, XU DW, XIA C, SHEN LY, YU YH

Improvement of Al2O3 Films on Graphene Grown by Atomic Layer Deposition with Pre-H2O Treatment

ACS APPLIED MATERIALS INTERFACES

ZHENG L, CHENG XH, CAO D, WANG G, WANG ZJ, XU DW, XIA C, SHEN LY, YU YH, SHEN DS

Studies on H2O-based Atomic Layer Deposition of Al2O3 Dielectric on Pristine Graphene

JOURNAL OF INORGANIC MATERIALS

ZHANG YW, WAN L, CHENG XH, WANG ZJ, XIA C, CAO D, JIA TT, YU YH