国家/地区 |
China(10)![]() |
关键词 |
MEMS(10)![]() |
出版物 |
JOURNAL OF MICROMEC.(2)
SENSORS(2)
SENSORS ACTUATORS A.(2)
|
出版时间 | 2015(2) 2021(2) |
机构 | TSINGHUA UNI.(2) |
作者 | LI P(2) |
SENSORS ACTUATORS APHYSICAL
ZHANG T, BAO JF, ZENG RZ, YANG Y, BAO LL, BAO FH, ZHANG Y, QIN F
JOURNAL OF PHYSICS DAPPLIED PHYSICS
LIANG J, LIU BH, ZHANG HX, ZHANG H, ZHANG ML, ZHANG DH, PANG W
SENSORS ACTUATORS APHYSICAL
LI P, YOU Z, CUIA TH
APPLIED SURFACE SCIENCE
CHEN BD, LIU HZ, LI X, LU CX, DING YC, LU BH
JOURNAL OF MICROMECHANICS MICROENGINEERING
LI P, CUI TH
SENSORS
WANG JF, BIAN C, TONG JH, SUN JZ, LI Y, HONG W, XIA SH
MICROELECTRONIC ENGINEERING
TANG CG, WANG YQ, LI YN, ZENG SM, KONG LB, LI LA, SUN JY, ZHU MQ, DENG T
SENSORS
LIU DS, WEI SS, WANG DJ
CRYSTALS
ZHANG Q, PANG X, ZHAO YL
JOURNAL OF MICROMECHANICS MICROENGINEERING
HAN BQ, LIU TH, WANG HR, SHI LJ, CHEN JL, SUN JH, WANG JH, TIAN XQ