国家/地区 China(10)
关键词 MEMS(10)
出版物 JOURNAL OF MICROMEC.(2) SENSORS(2) SENSORS ACTUATORS A.(2)
出版时间 2015(2) 2021(2)
机构 TSINGHUA UNI.(2)
作者 LI P(2)

SENSORS ACTUATORS APHYSICAL

ZHANG T, BAO JF, ZENG RZ, YANG Y, BAO LL, BAO FH, ZHANG Y, QIN F

JOURNAL OF PHYSICS DAPPLIED PHYSICS

LIANG J, LIU BH, ZHANG HX, ZHANG H, ZHANG ML, ZHANG DH, PANG W

APPLIED SURFACE SCIENCE

CHEN BD, LIU HZ, LI X, LU CX, DING YC, LU BH

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI P, CUI TH

MICROELECTRONIC ENGINEERING

TANG CG, WANG YQ, LI YN, ZENG SM, KONG LB, LI LA, SUN JY, ZHU MQ, DENG T