国家/地区 | Japan(3) |
关键词 | |
出版物 | JAPANESE JOURNAL OF.(2) |
出版时间 | 2013(3) |
机构 | NATL INST AD.(2) |
作者 | TAKAKUWA Y(3) |
MICROELECTRONIC ENGINEERING
SATO M, OGAWA S, INUKAI M, IKENAGA E, MURO T, TAKAKUWA Y, NIHEI M, YOKOYAMA N
JAPANESE JOURNAL OF APPLIED PHYSICS
OGAWA S, YAMADA T, ISHIDZUKA S, YOSHIGOE A, HASEGAWA M, TERAOKA Y, TAKAKUWA Y
JAPANESE JOURNAL OF APPLIED PHYSICS
SATO M, TAKAHASHI M, NAKANO H, MURO T, TAKAKUWA Y, SATO S, NIHEI M, YOKOYAMA N