国家/地区 | Usa(4) |
关键词 | ATOMIC LAYER DEPOSITION(4) |
出版物 | |
出版时间 | 2014(4) |
机构 | |
作者 |
MATERIALS RESEARCH EXPRESS
BEATTY J, CAO Y, TANABE I, DRIVER MS, DOWBEN PA, KELBER JA
JOURNAL OF MATERIALS SCIENCE TECHNOLOGY
AZIZ S, ZHAO JQ, CAIN C, WANG Y
MRS BULLETIN
VOON LCLY, GUZMANVERRI GG
APPLIED SURFACE SCIENCE
MCDONNELL S, AZCATL A, MORDI G, FLORESCA C, PIRKLE A, COLOMBO L, KIM J, KIM M, WALLACE RM