国家/地区 | Japan(3) |
关键词 | |
出版物 | JAPANESE JOURNAL OF.(2) |
出版时间 | 2013(3) |
机构 | NATL INST AD.(3) |
作者 | NIHEI M(3) |
MICROELECTRONIC ENGINEERING
SATO M, OGAWA S, INUKAI M, IKENAGA E, MURO T, TAKAKUWA Y, NIHEI M, YOKOYAMA N
JAPANESE JOURNAL OF APPLIED PHYSICS
KAWABATA A, MURAKAMI T, NIHEI M, YOKOYAMA N
JAPANESE JOURNAL OF APPLIED PHYSICS
SATO M, TAKAHASHI M, NAKANO H, MURO T, TAKAKUWA Y, SATO S, NIHEI M, YOKOYAMA N