国家/地区 Japan(3)
关键词
出版物 JAPANESE JOURNAL OF.(2)
出版时间 2013(3)
机构 NATL INST AD.(3)
作者 NIHEI M(3)

MICROELECTRONIC ENGINEERING

SATO M, OGAWA S, INUKAI M, IKENAGA E, MURO T, TAKAKUWA Y, NIHEI M, YOKOYAMA N

JAPANESE JOURNAL OF APPLIED PHYSICS

KAWABATA A, MURAKAMI T, NIHEI M, YOKOYAMA N

JAPANESE JOURNAL OF APPLIED PHYSICS

SATO M, TAKAHASHI M, NAKANO H, MURO T, TAKAKUWA Y, SATO S, NIHEI M, YOKOYAMA N