国家/地区 Canada(2)
关键词 PLASMA ETCHING(2)
出版物
出版时间 2020(2)
机构 MCMASTER UNIV(2)
作者 FANCHINI G(2) HILKE M(2) HUI LS(2) MUNIR M(2)
TURAK A(2) VUONG A(2) WONG V(2)

ACS APPLIED MATERIALS INTERFACES

HUI LS, MUNIR M, VUONG A, HILKE M, WONG V, FANCHINI G, SCHARBER MC, SARICIFTCI NS, TURAK A

ECS JOURNAL OF SOLID STATE SCIENCE TECHNOLOGY

HUI LS, MUNIR M, WHITEWAY E, VUONG A, HILKE M, WONG V, FANCHINI G, TURAK A