国家/地区 Germany（2）
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出版物 MICROELECTRONIC ENGINEERING（2）
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Processing and integration of graphene in a 200 mm wafer Si technology environment

MICROELECTRONIC ENGINEERING

LISKER M, LUKOSIUS M, FRASCHKE M, KITZMANN J, DABROWSKI J, FURSENKO O, KULSE P, SCHULZ K, KRUGER A, DREWS J, SCHULZE S, WOLANSKY D, SCHUBERT AM, KATZER J, STOLAREK D, COSTINA I, WOLFF A, DZIALLAS G, COCCETTI F, MAI A

Graphene transfer methods for the fabrication of membrane-based NEMS devices

MICROELECTRONIC ENGINEERING

WAGNER S, WEISENSTEIN C, SMITH AD, OSTLING M, KATARIA S, LEMME MC