国家/地区 China(4)
关键词 ICPECVD(2)
出版物 PLASMA SCIENCE TECHNOLOGY(5)
出版时间
机构 ZHEJIANG UNI.(3)
作者 LI XD(3) WU AJ(3) YAN JH(3) CHEN H(2)
YANG J(2) ZHENG JG(2)

PLASMA SCIENCE TECHNOLOGY

ZHENG JG, TAN QH, CHEN H, WU AJ, LI XD, YAN JH, DAI JX, ZHOU J

PLASMA SCIENCE TECHNOLOGY

WU AJ, CHEN H, ZHENG JG, YANG J, LI XD, DU CM, CHEN ZL, XU AN, QIU J, XU Y, YAN JH

PLASMA SCIENCE TECHNOLOGY

YE K, ZHANG D, ZHANG KW, WANG HY, LIANG F, MA WH, YANG B, DAI YN

PLASMA SCIENCE TECHNOLOGY

CHEN JL, JI PY, LI MY, HUANG TY, ZHUGE LJ, WU XM