国家/地区 | China(4) |
关键词 | ICPECVD(2) |
出版物 | PLASMA SCIENCE TECHNOLOGY(5) |
出版时间 | |
机构 | ZHEJIANG UNI.(3) |
作者 |
LI XD(3)
WU AJ(3)
YAN JH(3)
CHEN H(2)
YANG J(2) ZHENG JG(2) |
PLASMA SCIENCE TECHNOLOGY
ZHENG JG, TAN QH, CHEN H, WU AJ, LI XD, YAN JH, DAI JX, ZHOU J
PLASMA SCIENCE TECHNOLOGY
WU AJ, CHEN H, ZHENG JG, YANG J, LI XD, DU CM, CHEN ZL, XU AN, QIU J, XU Y, YAN JH
PLASMA SCIENCE TECHNOLOGY
YANG J, XU RY, WU AJ, LI XD, LI L, SHEN WJ, YAN JH
PLASMA SCIENCE TECHNOLOGY
YE K, ZHANG D, ZHANG KW, WANG HY, LIANG F, MA WH, YANG B, DAI YN
PLASMA SCIENCE TECHNOLOGY
CHEN JL, JI PY, LI MY, HUANG TY, ZHUGE LJ, WU XM