国家/地区 中国（2）
IPC部 C（2） H（2）
IPC大类 C04（2）
IPC小类 C04B（2）
IPC
发明人
公开年 2022（2）
申请年 2021（2）
专利权人

Electromagnetic wave absorption structure comprises electromagnetic wave composite absorbing layer, where electromagnetic wave composite absorbing layer comprises conductive composite layer and insulating layer, and insulating layer is stacked and overlapped with conductive composite layer.

WU F

Ceramic structure for forming component of plasma processing apparatus, contains silicon carbide, silicon carbonitride, titanium carbide or titanium carbonitride as main component, and two main surfaces having different carbon concentration.

HAMASHIMA H