国家/地区 中国（2）
IPC部 C（2）
IPC大类
IPC小类
IPC
发明人
公开年 2023（2）
申请年 2023（2）
专利权人 UNIV BEIJING SCI TECHNOLOGY（2）

Reducing damage to substrate when using plasma-enhanced atomic layer deposition to grow thin film involves depositing oxide film on cleaned substrate using water/ozone source and metal source, and depositing nitride film using plasma source.

HU Y, ZHU X, TIAN F, YANG J, LIU H, QIU P, WEI H, ZHENG X, QIU H

Preparing composite gas gel based on graphite alkyne-based structure used in photo-thermal evaporation material, comprises e.g. carrying out coupling reaction to oxidized graphene and hexacetenyl benzene monomer, mixing polyvinyl alcohol aqueous solution, hydrothermally reacting and freeze-drying.

HU X, PAN Y, ZHAO Y, MA K, HU S, DAI F, KANG Z, XIONG Z, ZHANG Y