国家/地区 中国（2）
IPC部 H（2）
IPC大类 H01（2）
IPC小类 H01L（2）
IPC
发明人
公开年
申请年
专利权人 TOKYO ELECTRON LTD（2）

Upper electrode assembly used in plasma processing apparatus, has heat transfer sheet that is mounted between electrode plate and metal plate and having vertically oriented portion with vertically oriented graphene structures.

TSUJIMOTO H, KOBUNE T, LI L, LEE L, KOBUNEDAKAKI

Making optically transparent electrically conductive nanostructure film comprises coating dispersion/solution of nanostructure selected from carbon nanotube, fullerenes, graphene flake/sheets on substrate; washing and drying.

DRZAIC P, HUANG T, HU L, IRVIN G, LADOUS C, PARK Y, OWEN G