国家/地区 韩国（2）
IPC部 H（2）
IPC大类 H01（2）
IPC小类 H01L（2）
IPC
发明人 LEE S K（2）
公开年 2016（2）
申请年 2015（2） 
专利权人

Substrate susceptor for heating up semiconductor substrate by utilizing heater during e.g. film forming process of semiconductor film, has plate heater for settling substrate in upper side of carbon nanotube-graphene composite.

LEE S K, PARK Y S

Manufacture of pure graphene used for manufacturing graphene phosphorene, involves solidifying graphite or expanded graphite in water, carrying out liquid pulsed laser ablation, separating into sheets, dispersing in solvent, and drying.

LEE Y S, LEE S K