国家/地区 中国（2）
IPC部
IPC大类
IPC小类
IPC
发明人 QIU Z（2）
公开年 2013（2）
申请年
专利权人

Graphene moving device, has pressing component used for exerting pressure to driving pressing roller and provided with pressing servo motor, shaft coupling and ball screw, and flexible bearing connected with tension and compression sensor.

YANG J, ZHANG Q, XIANG Y, XIONG L, ZHENG B, MA H, QIU Z, ZHAO Y, GANG P, SUN X, WANG X, SONG D

Integration method of graphene high-k gate dielectric layer used for semiconductor device, involves dissolving metal alkoxide in solvent, coating alkoxide solution on graphene surface and carrying out atomic layer deposition process.

CHEN G, LIU R, QIU Z, LU B, ZHANG Y