国家/地区 美国（3）
IPC部 C（3）
IPC大类 C01（3）
IPC小类 C01B（3）
IPC C01B031/04（2）
发明人 ZHANG Z（3）
公开年
申请年
专利权人

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Making metal oxide-graphene composite involves providing composition comprising graphene oxide and at least one metal-containing substrate, where composition is dispersed in liquid medium, and forming metal oxide-graphene composite.

ZHAO C, DONG X, MIN S, ZHANG Z, WANG K, DONG J, QIAN X, CHEN X

Manufacture of large-scale three dimensional transparent graphene electrode used in electric and electronic applications, involves spraying conductive macromolecule solution and graphene solution, and drying.

HUH H, KIM W S, KIM H J, YOO E S, CHOI S H, HWANG J Y, JANG J Y, KIM T I, HEO H, HYEONG P N, SIK K U, JIN K H, SEONG Y E, HUN C S, YEONG H J, YEONG J J, IL K T, PARK N H, JIN T, ZHANG Z, CHOE S, HWANG J, KIM H, KIM W, YOO E