国家/地区 韩国（2） 美国（2）
IPC部 B（2）
IPC大类 B01（2）
IPC小类 B01J（2）
IPC C01B032/182（2）
发明人
公开年 2018（2）
申请年 2017（2）
专利权人

Production of graphene used as wiring material, involves supplying carbon-containing gas and metal catalyst into chamber and reactivating catalyst by supplying process gas and carbon-containing gas to regrow graphene on catalyst surface.

IFUKU R, MATSUMOTO T

Thermal treatment apparatus for high quality graphene synthesis, has catalyst metal film where outlet transferred from down direction diversion roller to winding roller are passed through feed roller in deposition chamber.

KIM Y K, YONG K K, KIM Y, KI K Y