国家/地区 中国（2）
IPC部 C（2）
IPC大类 C23（2）
IPC小类 C23C（2）
IPC C23C014/08（2）
发明人 CHEN X（2）
公开年 2022（2）
申请年
专利权人

Preparing magnetron graphene-based micro-nano motor comprises mixing ferric chloride crystal powder with deionizgraphene-baseded water, immersing in ferric chloride solution, attaching carbon-based microspheres, and pumping out gas in vacuum cavity and continuously introducing oxygen.

CHEN X, HOU M, YAN L, XIE B, GUO Y, CHEN Y

Semiconductor component useful in plasma reaction device and plasma etching process of process gas e.g. carbon tetrafluoride and oxygen, comprises conductive heat conducting material filled in pores of first corrosion resistant coating.

NI T, CHEN X, ZHU S